陈远流，广东潮州人，国家杰出青年科学基金获得者，浙江大学求是特聘教授、长聘教授、博士生导师，流体动力基础件与机电系统全国重点实验室副主任。国际生产工程科学院（CIRP）会员，中国机械工程学会极端制造分会、微纳制造分会委员，中国仪器仪表学会集成电路分会委员，中国微纳技术学会微纳传感器与执行器分会理事。主要研究方向包括智能超精密制造、先进检测技术与控制、原子级制造等。 近年来主持承担了国家重点研发计划、国家自然科学基金联合基金重点项目等国家科研任务，研究成果在CIRP Annals等期刊上发表SCI论文70余篇，授权发明专利30余项。聚焦超精密加工的智能感知与控制方向，研制出多种适用于跨尺度、超精密制造过程的高性能测量测试设备，并将成果应用于国家重要战略领域，支撑了国家重点任务的顺利完成和重点型号装备的成功研制。曾获日本机械工程学会（JSME）青年研究学者奖、中国工程前沿杰出青年学者、中国刀协切削先进技术研究会青年新秀奖。研究成果获得2023年度中国机械工业科学技术奖一等奖（排名1）、2020年浙江省科学技术奖（技术发明）一等奖。 欢迎有兴趣的研究人员和同学加入我们团队！

智能超精密制造 微纳测量与控制 原子级制造

Y.L. Chen, Y. Xu, Y. Shimizu, H. Matsukuma and W. Gao. High quality-factor quartz tuning fork glass probe used in tapping mode atomic force microscopy for surface profile measurement. Measurement Science and Technology. 2018. Accepted and In Press. doi.org/10.1088/1361-6501/aab998 Y. L. Chen, Y. Machida, Y. Shimizu, H. Matsukuma and W. Gao. A stitching linear-scan method for roundness measurement of small cylinders. CIRP Annals-Manufacturing Technology. 2018. Accepted and In Press. Y.L. Chen, Z. Niu, D. Matsuura, J.C. Lee, Y. Shimizu, W. Gao, J.S. Oh and C.H. Park. Implementation and verification of a four-probe motion error measurement system for a large-scale roll lathe used in hybrid manufacturing. Measurement Science and Technology. 28 (2017) 105004. Y.L. Chen, Y. Cai, M. Xu, Y. Shimizu and W. Gao. An edge reversal method for precision measurement of cutting edge radius of single point diamond tools. Precision Engineering. 50 (2017), 380-387. Y.L. Chen, Y. Cai, K. Tohyama, Y. Shimizu and W. Gao. Auto-tracking single point diamond cutting on non-planar brittle material substrates by a high-rigidity force controlled fast tool servo. Precision Engineering. 49 (2017), 253-261. Y.L. Chen, J. Tamada, Y. Kudo, S. Madokoro, K. Nakamura and W. Gao. Optical frequency domain angle measurement in a femtosecond laser autocollimator. Optics Express.25 (2017), 16725-16738. Y.L. Chen, Y. Shimizu, Y. Kudo, S. Ito and W. Gao. Mode-locked Laser Autocollimator with an Expanded Measurement Range. Optics Express. 24, 14(2016), 15554-15569. Y.L. Chen, S. Ito, H. Kikuchi, Y. Shimizu, W. Gao. On-line qualification of a micro probing system for precision length measurement of micro-features on precision parts. Measurement Science and Technology. 27 (2016): 074008. Y.L. Chen, Y. Cai, Y. Shimizu, S. Ito, W. Gao, B. F. Ju. Ductile cutting of silicon microstructures with surface inclination measurement and compensation by using a force sensor integrated single point diamond tool. Journal of Micromechanics and Microengineering 26 (2015): 025002. Y.L. Chen, Y. Cai, Y. Shimizu, S. Ito, W. Gao, B. F. Ju. On-machine measurement of microtool wear and cutting edge chipping by using a diamond edge artifact. Precision Engineering 43 (2015): 462-467. Y.L. Chen, Y. Shimizu, S. Wang, S. Ito, B.F. Ju，W. Gao. Self-evaluation of the cutting edge contour of a micro diamond tool with a force sensor integrated fast tool servo on an ultra-precision lathe. International Journal of Advanced Manufacturing Technology 77 (2015): 2257-2267. Y.L. Chen, S. Wang, Y. Shimizu, S. Ito, W. Gao, B.F. Ju. An in-process measurement method for repair of defective microstructure by using a fast tool servo with a force sensor. Precision Engineering. 39 (2015): 134-142. Y.L. Chen, W.L. Zhu, S. Yang, B.F. Ju, Y. Ge. Large-area profile measurement of sinusoidal freeform surfaces using a new prototype scanning tunneling microscopy. Precision Engineering. 38 (2014): 414-420. Y.L. Chen, W. Gao, B.F. Ju, Y. Shimizu, S. Ito. A measurement method of cutting tool position for relay fabrication of microstructure surface. Measurement Science and Technology. 25 (2014): 064018. Y. Cai, Y.L. Chen, M. Xu, Y. Shimizu, S. Ito, H. Matsukuma, W. Gao. An ultra-precision tool nanoindentation instrument for replication of single point diamond tool cutting edges. Measurement Science and Technology, 29 (2018): 054004. Z. Niu, Y.L. Chen, Y. Shimizu, H. Matsukuma and W. Gao. Error Separation Method for Precision Measurement of the Run-Out of a Microdrill Bit by Using a Laser Scan Micrometer Measurement System. Journal of Manufacturing and Materials Processings. 2(2018), 4. Y. Cai, Y.L. Chen, Y. Shimizu, S. Ito, W. Gao. Molecular dynamics simulation of subnanometric tool-workpiece contact on a force sensor-integrated fast tool servo for ultra-precision microcutting. Applied Surface Science, 369 (2016): 354–365. Y. Cai, Y.L. Chen, Y. Shimizu. MD simulation of elastic-plastic transition associated with tool-workpiece contact in FS-FTS. Journal of Engineering Manufacture, (2016), in press. Z. Niu, Y.L. Chen, D. Matsuura, J.C. Lee, R. Kobayashi, Y. Shimizu, S. Ito, W. Gao, J.S. Oh and C.H. Park. Precision Measurement of Z-Slide Vertical Error Motion of an Ultra-Precision Lathe by Using Three-probe Method.International Journal of Precision Engineering and Manufacturing. 18 (2017): 651-660. S. Ito, Y.L. Chen, Y. Shimizu, et al. Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system. Precision Engineering. 43 (2016): 525-529.