车录锋，男，河南省内黄县人，博士、教授, 浙江省计划科技创新领军人才、浙江省先进微纳传感技术重点实验室主任、加州大学伯克利分校（UC Berkeley）访问教授， 浙江大学微电子集成系统研究所副所长， 微系统技术国家级重点实验室学术委员会委员、《光学精密工程》期刊编委。 1999年10月在浙江大学获博士学位，1999年11月至2001年11月中国科学院上海微系统与信息技术研究所 电子科学与技术流动站博士后。2005年美国加州大学伯克利分校 (UC Berkeley）传感器与执行器中心(BSAC)高级访问学者，2006年1月-2016年4月中国科学院上海微系统与信息技术研究所 传感技术国家重点实验室研究员、微系统技术国家级重点实验室副主任，2016年5月-2018年2月浙大生仪学院教授，2018年3月至今浙大信电学院教授。主要从事高性能MEMS传感器、微系统及微能源技术研究。 针对我国新一代石油勘探装备的应用需求，通过敏感结构和加工工艺等关键技术创新，研制出高性能MEMS振动传感器产品，量程2g，动态范围达到120dB，为目前国内外同类MEMS传感器产品中的最高性能指标，打破了国际垄断，为新型“全数字地震数据采集系统”重大装备的研发提供了重要支撑；研制的抗单粒子闩锁加速度传感器模块作为关键载荷，已提供给我国系列微纳卫星应用；研制的MEMS陀螺芯片照片刊登在国际著名MEMS杂志JMM封面上，引起了国际同行的高度关注。 做为负责人在研或完成国家科技重大专项课题3项、科技部863课题5项、国家自然科学基金课题5项, 获上海市技术发明二等奖一项。 奖励荣誉 浙江大学求是科研岗教授 浙江省万人计划科技创新领军人才 绍兴市越城区政协常委 绍兴市越城区首位度建设突出贡献奖 首批绍兴“名士之乡”特支计划科技创新拔尖人才 绍兴市越城区滨海新区首批双聘制高层次人才 浙江大学优秀班主任 浙江大学优秀新生之友

高性能MEMS传感器 芯片异构集成微系统

Selected Journal Publications 31 Zhi Ding, Weijian Li, Weidong Wang, Zhengqian Zhao, Ye Zhu, Baoyin Hou, Lijie Zhu,Ming Chen, and Lufeng Che, Highly Sensitive Iontronic Pressure Sensor with Side-by-Side Package Based on Alveoli and Arch Structure, Advanced Science,2024,2309407 30 Lijie Zhu, Likang Guo, Zhi Ding, Zhengqian Zhao, Chaoran Liu, and Lufeng Che, Self-Powered IntelligentWater Droplet Monitoring Sensor Based on Solid–Liquid Triboelectric Nanogenerator, Sensors, 2024, 24:1761 29 Baoyin Hou, Ye Zhu, Chaofan He, Weidong Wang, Zhi Ding, Wen He, Yong He, Lufeng Che, A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope, Microsystems & Nanoengineering,2024,10:32 28 Mengjia Chen, Ruifeng Zhu, Youling Lin, Zhengqian Zhao, Lufeng Che, Analysis and compensation for nonlinearity of sandwich MEMS capacitive accelerometer induced by fabrication process error, Microelectronic Engineering, 2022, 252: 111672 27 Yangming Liu, Jialin Liu, Lufeng Che, A High Sensitivity Self-Powered Wind Speed Sensor Based on Triboelectric Nanogenerators (TENGs), Sensors, 2021, 21(9): 2951 26 Chaoran Liu, Yishao Wang, Nan Zhang, Xun Yang, Zuankai Wang, Libo Zhao,Weihuang Yang, Linxi Dong, Lufeng Che, etc. A self-powered and high sensitivity acceleration sensor with V-Q-a model based on triboelectric nanogenerators (TENGs)，Nano Energy, 2020, 67:104228 25 Jiaqian Li, Xiaofeng Zhou, Jing Li, Lufeng Che, Jun Yao, Glen McHale,Manoj K. Chaudhury, Zuankai Wang, Topological liquid diode, Science Advance, 2017,3: eaao3530 24 Chaoran Liu, Jiaqian Li, Lufeng Che, Shaoqiang Chen, Zuankai Wang, Xiaofeng Zhou,Toward large-scale fabrication of triboelectric nanogenerator (TENG) with silk-fibroin patches film via spray-coating process, Nano Energy, 2017, 41:359-366 23 Chaoran Liu, Jing Sun, Jing Li, Chenghao Xiang, Lufeng Che, Zuankai Wang &Xiaofeng Zhou, Long-range spontaneous droplet self-propulsion on wettability gradient surfaces, Scientific Reports, 2017,7: 7552 22 Xiaofeng Zhou, Jiaqian Li, Hongyan Sun, Yi Hu, Lufeng Che, Zuankai Wang,Controlled Cell Patterning on Bioactive Surfaces with Special Wettability, Journal of Bionic Engineering,2017,14:440–447 21 Chenghao Xiang, Chaoran Liu, Chonglei Hao, Zuankai Wang, Lufeng Che,Xiaofeng Zhou，A self-powered acceleration sensor with flexible materials based on triboelectric effect，Nano Energy, 2017,31: 469–477 20 Pengyu Li, Lufeng Che, Landing point location algorithm based on asynchronous time difference of arrival (ATDOA) method, Microsystem Technologies, 2017, 23:1475-1484 19 Chonglei Hao,Yang Zhou,Xiaofeng Zhou, Lufeng Che, Baojin Chu,and Zuankai Wang,Dynamic control of droplet jumping by tailoring nanoparticle concentrations, Applied Physics Letters, 2016, 109: 021601 18 G.Q. Wu, D.H. Xu, B. Xiong, L.F. Che, Y.L. Wang, Design, fabrication and characterization of a resonant magnetic fieldsensor based on mechanically coupled dual-microresonator, Sensors and Actuators A, 2016, 248:1–5 17 Chonglei Hao, Jing Li, Yuan Liu, Xiaofeng Zhou, Yahua Liu, Rong Liu, Lufeng Che,Wenzhong Zhou, Dong Sun, Lawrence Li, Lei Xu & Zuankai Wang,Superhydrophobic-like tunable droplet bouncing on slippery liquid interfaces, Nature Communications, Aug.7,2015，DOI: 10.1038/ncomms8986 16 Zhaohui Song, Teng Sun, Jian Wu, Lufeng Che, System-level Simulation and Implementation for a High Q Capacitive Accelerometer with PD feedback compensation, Microsystem Technologies,2015,21(10): 2233-2240 15 Xiaofeng Zhou, LufengChe, Shenglin Liang, Xiaolin Li, Yuelin Wang，Design and fabrication of a MEMS capacitive accelerometer with fully symmetrical double-sided H-shaped beam，Microelectronic Engineering，2015，131：51-57 14 Wei Li, Zhaohui Song, Xiaohong Ge,Lufeng Che, Yuelin Wang, A novel self-aligned electrostatic vertical actuator using plastic deformation technology, Microsystem Technologies, 2014，20（2）：251-257 13 Xuemei Chen, Ruiyuan Ma, Hongbo Zhou, Xiaofeng Zhou, Lufeng Che, Shuhuai Yao & Zuankai Wang, Activating the Microscale Edge Effect in a Hierarchical Surface for Frosting Suppression and Defrosting Promotion, Scientific Reports, 2013,3:2515 12 XiaofengZhou, LufengChe, JianWu, Xiaolin Li, YuelinWang, A novel sandwich capacitive accelerometer with symmetrical structure fabricated from D-SOI wafer, Journal of Micromechanics and Microengineering. 2012，22(8): 085031 (8pp) 11 XiaofengZhou, LufengChe, Bin Xiong, Xiaolin Li, JianWu, YuelinWang, A novel capacitive accelerometer with a highly symmetrical double-sided beam-mass structure, Sensors and Actuators A,2012,179:291-296. 10 Xiaofeng Zhou, Lufeng Che,Bin Xiong,etl, Single wafer fabrication of a symmetric double-sided beam–mass structure using DRIE and wet etching by a novel vertical sidewall protection technique, Journal of Micromechanics and Microengineering，2010,20(11): 115009 (14pp) 9 Lufeng Che, Bin Xiong, Yufang Li, Yuelin Wang，A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure operating at atmospheric pressure，Journal of Micromechanics and Microengineering，2010,20(1): 015025(6pp) 8 Fei Xiao, Lufeng Che, Bin Xiong, Yuelin Wang, Xiaofeng Zhou, Yufang Li and Youling Lin, A novel capacitive accelerometer with an eight-beam-mass structure by self-stop anisotropic etching of (100) silicon, Journal of Micromechanics and Microengineering, 2008,18(7):075005(7pp) 7 S.Y. Xiao, L.F. Che, X.X. Li and Y.L. Wang, A novel fabrication Process of MEMS devices on polyimide flexible substrates, Microelectronic Engineering, 2008，85:452–457 6 Kebin Fan, Lufeng Che, Bin Xiong and Yuelin Wang, A silicon micromachined high-shock accelerometer with a bonded hinge structure, Journal of Micromechanics and Microengineering, 2007,17(6):1206–1210 5 Suyan Xiao, Lufeng Che, Xinxin Li, Yuelin Wang, A cost-effective flexible MEMS technique for temperature sensing, Microelectronics Journal, 2007,38(3):360-364 4 Linxi Dong, Lufeng Che, Lingling Sun, Yuelin Wang, Effects of non-parallel combs on reliable operation conditions of capacitive inertial sensor for step and shock signals, Sensors and Actuators A, 2005,12(2):395-404 3 Lufeng Che, Bin Xiong, Linxi Dong, Yuelin Wang, Effects of bias voltage polarity on differential capacitive sensitive devices, Sensors and Actuators A, 2004,112(2-3):253-261 2 Lufeng Che, Bin Xiong, Yuelin Wang, System modelling of a vibratory micromachined gyroscope with bar structure, Journal of Micromechanics and Microengineering, 2003,13(1):65-71 1 Bin Xiong, Lufeng Che, Yuelin Wang, A novel bulk micromachined gyroscope with slots structure working at atmosphere, Sensors and Actuators A, 2003,107(2): 137-145