甘志银（Gan Zhiyin，Professor），华中科技大学教授。1987在天津南开大学物理系取得学士学位，1990年在北京工业大学应用物理系取得硕士学位。1992年到2002年，先后在北京、深圳以及武汉工作并从事光电领域研究。2003年6月调入华中科技大学机械科学与工程学院以及武汉光电国家实验室成为副教授，同时开始攻读博士学位。于2008年被授予物理电子学博士学位，2010年成为教授。目前主要从事计算物理、MEMS/NEMS系统设计及仿真、MEMS制造工艺与设备、半导体工艺设备设计与制造等研究。作为技术带头人主导的MOCVD设备已获得广东省科技厅科技成果鉴定“国际先进”评价，该设备也已进入产业化阶段，实现了市场突破。

微纳材料与器件设计与仿真 半导体工艺装备设计与制造

目前主要从事计算物理、MEMS/NEMS系统设计及仿真、MEMS制造工艺与设备、半导体工艺设备设计与制造等研究

1. Zhiyin Gan, Dexiu Huang, Xuefang Wang, Dong Lin, Sheng Liu. “Getter free vacuum packaging for MEMS”, Sensors and Actuators A: Physical, 149(1), 2009: 159 ~ 164. 2. Tingkai Zhang, Honghai Zhang, Jian Xu, Sheng Liu, Zhiyin Gan. “Study on triple-stack anodic bonding using two electrodes”, Sensors and Actuators A: Physical, 157(1), 2010: 168 ~ 172. 3. Hui Cao, Zhiyin Gan, Qiang Lv, Han Yan, Xiaobin Luo, Xiaohui Song and Sheng Liu. “Single-walled carbon nanotube network/poly composite thin film for flow sensor”, Microsystem Technologies, 16(6), 2010: 955 ~ 959. 4. C. MingXiang, Y. Xingjian, G. Zhiyin and L. Sheng. "Reliability of Anodically Bonded Silicon－glass Packages", Sensors and Actuators, 120(1), 2005: 291 ~ 295. 5. Song X. H., Gan Z. Y., Liu S., Yan H., and Lv Q. (2009), “Computational study of thermocompression bonding of carbon nanotubes to metallic substrates,” Journal of Applied Physics 106:104308. 6. Song X. H., Gan Z. Y., Liu S., Yan H., and Lv Q. (2009), “Controllable fabrication of carbon nanotube-polymer hybrid thin film for strain sensing,” Microelectronic Engineering 86:2330-2333. 7. Song X. H., Liu S., Yan H., and Gan Z. Y., (2009), “First-principles study on effects of mechanical deformation on outer surface reactivity of carbon nanotubes,” Physica E 41:626-630 8. Wang, P., Gan, Z. Y. and Liu, S. (2009), “Improved light extraction of GaN-based light-emitting diodes with surface-patterned ITO,” Optics & Laser Technology 41: 823-826. 9. Gan, Z. Y., Yan, H., Song, X. H., Lv, Q., Cao, H., Xu, J. P., Liu, S. (2009) “Application of Car-Parrinello Molecular Dynamics to Ga-rich GaN Buffer Layer for Stress Relaxation in GaN Grown Layer,” International Journal of Nonlinear Sciences and Numerical Simulation.10(5): 557-562. 10. Yan, H., Gan, Z. Y., Song, X. H., Chen, Z. H., Xu, J. P., Liu,S. (2009) , “Adsorption configuration of magnesium on wurtzite gallium nitride surface using first-principles calculations,” Physica B 404:3594-3597. 11. Yan, H., Gan, Z. Y., Song, X. H., Lv, Q., Xu, J. P., Liu, S. (2009), “Car-Parrinello simulation of initial growth stage of gallium nitride on carbon nanotube,” Physica E 41:1143~1146 .