曹坤（Kun Cao, Professor），教授，博士生导师, 国家级青年人才，九三学社社员。主要研究方向为原子级制造，包括原子层沉积/刻蚀、区域选择性原子层沉积、原子级制造装备研发等，面向集成电路先进制程研发、先进存储器制造工艺、光电子器件与传感器等应用领域。以第一/通讯作者在Nature Communications、Small、Nano Letters、ACS Materials Letters等国内外期刊发表SCI论文40余篇。获湖北省优秀科技论文，国际极端制造期刊IJEM年度最佳论文，J. Vac. Sci. Technol. A期刊年度“most read”论文等。相关研究成果获美国真空协会AVS，国际科技杂志C&EN封面专栏报道，受到台积电、三星、IMEC等企业跟踪研究人员引用报道。授权国家发明专利20余项，参研项目获湖北省技术发明一等奖2项、日内瓦国际发明展评审团特别嘉许金奖等。国家重点研发计划课题负责人，主持国家自然科学基金面上项目、青年项目。作为技术骨干参与国基金重点项目/国际合作交流项目，湖北省创新群体项目等。

选择性原子层沉积工艺与装备 柔性显示电子制造与封装

论文专著： [1] Tianwei Zhang, Qing Xu, Yilei Zhang, Kun Cao*, Rong Chen*“Dual-Oxide Bridge-Trap Structure via Atomic Layer Infiltration for Enhanced Performance of Quantum Dot Photodetector” Nano Letters. 2025, 25, 1115 [2] Zilian Qi, Haojie Li, Kun Cao*, Eryan Gu, Yanwei Wen, Junzhou Long, Bin Shan, and Rong Chen* “Area Selective Deposition of Ru on W/SiO2 Nanopatterns via Sequential Reactant Dosing and Thermal Defect Correction” Chemistry of Materials. 2024, 36, 8133 [3] Yicheng Li, Zilian Qi, Yuxiao Lan, Kun Cao*, Yanwei Wen, Jingming Zhang, Eryan Gu, Junzhou Long, Jin Yan, Bin Shan, Rong Chen* “Self-Aligned Patterning of Tantalum Oxide on SiO2/Cu through Redox-coupled Inherently Selective Atomic Layer Deposition” Nature Communications. 2023, 14, 4493. [4] Zerui Jin, Huajun Zhou, Xiao-dong Zhang, Kun Cao*, Rong Chen* “Interface-mediated YIG/Ce:YIG Bilayers Structure with Enhanced Magneto-optical Properties via Pulsed Laser Deposition” ACS Materials Letters. 2023, 5, 803. [5] Kun Cao, Jiaming Cai, Rong Chen, “Inherently Selective Atomic Layer Deposition and Applications”, Chemistry of Materials, 2020, 32, 6, 2195 [6] Kun Cao, Jiaming Cai, Bin Shan, Rong Chen*, “Surface functionalization on nanoparticles via atomic layer deposition”, Science Bulletin, 2020, 65, 678 [7] Jiaming Cai, Zhang Liu, Kun Cao*, Yun Lang, Shengqi Chu, Bin Shan, Rong Chen*, “Highly dispersed Pt studded on CoOx nanoclusters for CO preferential oxidation in H2”, Journal of Materials Chemistry A, 2020, 8, 10180 [8] Yun Li, Kun Cao*, Ying fei Xiong, Huizhi Yang, Yinghao Zhang, Yuan Lin, Binze Zhou, Jing Huang, and Rong Chen* “Composite Encapsulation Films with Ultrahigh Barrier Performance for Improving the Reliability of Blue Organic Light-Emitting Diodes”, Advanced Materials Interfaces, 2020, 2000237 [9] Kun Cao, Miao. Gong, Jianfeng. Yang, Jiaming. Cai, Shengqi. Chu, Zhiping. Chen, Bin. Shan, Rong. Chen, “Nickel catalyst with atomically-thin meshed cobalt coating for improved durability in dry reforming of methane”, Journal of Catalysis, 2019, 373, 351 [10] Kun Cao, Quan Hu, Jiaming Cai, Miao Gong, Jianfeng Yang, Bin Shan, Rong Chen* “Development of a scanning probe microscopy integrated atomic layer deposition system for in-situ successive monitoring of thin films growth”, Rev. Sci. Instrum. 2018, 89, 123702. [11] Qinyong Xiang, Binze Zhou, Kun Cao*, Yanwei Wen, Yun Li, Zhaojie Wang, Chenchen Jiang, Bin Shan, Rong Chen* “Bottom up Stabilization of CsPbBr3 Quantum Dots-Silica Sphere with Selective Surface Passivation via Atomic Layer Deposition” Chemistry of Materials, 2018, 30, 8486 [12] Kun Cao, Lu Shi, Miao Gong, Jiaming Cai, Xiao Liu, Shengqi Chu, Bin Shan*, Rong Chen* “Nanofence Stabilized Platinum Nanoparticles Catalyst via Facet-Selective Atomic Layer Deposition” Small 2017, 13, 1700648.